【International Sales Office】
Address:Room 2401,Tower B, Winner Plaza, No.100 Huangpudadao West Road, Tianhe District, Guangzhou,China
Tel:+86-020-38856806
Fax:+86-020-38856809
E-mail:feng@blueskychemical.com
【Chinese Company Headquarters】
Address:NO.8 Chemical Industry Park Economic Development Zone Xiantao,Hubei,China
Tel:+86-0728-3254088
Fax:+86-0728-3253808
E-mail:feng@blueskychemical.com
·POSITION:Products → Function → Silicone source → Chemical name:Tetraethyl orthosilicate (electronic grade)
Product information
Chemical name:Tetraethyl orthosilicate (electronic grade)
Product code:BOSIL-781
CAS:78-10-4
Structural formula:
Molecular formula:C8H20O4Si
Empirical formula:208.33
Properties
Electronic grade Tetraethyl orthosilicate(TEOS) is mainly used in the CVD processof IC wafer manufacturing., which is strictly required of a high purity, above 8N, and all impurities must be less than 1ppb, especially on metal ion impurities (Na,K,Mg,Fe,Ca,Al,etc.) , metal ions are electroactive impurities, which will reduce the insulation performance of the silicon dioxide film layer deposited on the semiconductor device, and will lead to the interconnection of micron-scale circuits, resulting in the scrap of circuit boards. With the low contents of total cation and total chlorine,the electronic grade raw material, Tetraethyl orthosilicate, is fully qualified to be processed into electronic grade Tetraethyl orthosilicate.
Technical data
Note: the above data are for reference only, can not be used as a technical specification
Applications
Tetraethyl orthosilicate (electronic grade) is used for processing into electronic grade Tetraethyl orthosilicatefor wafer manufacture. It is used to produce silica dioxide thin films, which is an electronic chemical required in the manufacture of and is an electronic chemical required for the manufacture of semiconductors, discrete devices and MEMS(micro electro mechanical systems).
Tetraethyl orthosilicate(electronic grade) is used in the semiconductor industry to produce high quality grinding particles.
Tetraethyl orthosilicate(electronic grade) can be used as chlorine-free or ultra-low chlorine heat-resistant material.
Shelf life
Sealed storage, shelf life of 12 months, After the container is opened, it should be sealed to prevent the entry of water vapor and hydrolysis.
Packaging
For sizes and models of packaging, please contact the sales department of Hubei Bluesky New Material Inc
【International Sales Office】
Address:Room 2401,Tower B, Winner Plaza, No.100 Huangpudadao West Road, Tianhe District, Guangzhou,China
Tel:+86-020-38856806
Fax:+86-020-38856809
E-mail:feng@blueskychemical.com
【Headquarters & Plant】
Address:No.8 Development Avenue,New Materials Industrial Park,High tech Zone, Xiantao City, Hubei Province, China
Tel:+86-0728-3254088
Fax:+86-0728-3253808
E-mail:feng@blueskychemical.com
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